[13a-N106-1~5] 22.1 Joint Session M "Phonon Engineering"

▲ [13a-N106-5] Design and Fabrication of Silicon-Based Micro Thermoelectric Coolers

〇(M2)Eldar Sido¹, Ryoto Yanagisawa¹, Souta Koike¹, Patrick Ruther², Oliver Paul², Masashi Kurosawa³, Sebastian Volz^1,4, Masahiro Nomura¹ (1.IIS Univ. of Tokyo, 2.IMTEK Freiburg Univ., 3.Nagoya Univ., 4.LIMMS, CNRS-IIS)

Keywords:Thermoelectric Coolers, Nano-structures, Device Fabrication

With advent in fabrication of nanoscale devices and improvements in the capabilities of semiconductor device fabrications, more and more MEMS devices are being fabricated that test the limits of fabrication procedures. Nevertheless, currently cooling MEMS devices that can perform highly localized small-scale cooling are unavailable bringing fruition to our research. Here we present nano-structured silicon-based suspended uni-leg planar type thermoelectric coolers that have been designed, fabricated and measurement results validated by an IR camera. The fabricated thermoelectric coolers are the world's smallest thermoelectric devices with TE volume of material per unit device of 180 μm³ and 120 μm³ given two distinct geometries.