11:30 AM - 11:45 AM
[13a-N304-10] Detection of arsenic donor electrons using CP EDMR in Si MOSFETs
Keywords:Charge pumping, Electron spin resonance, As donor
Presentation information
Oral presentation
13 Semiconductors » 13.5 Semiconductor devices/ Interconnect/ Integration technologies
[13a-N304-1~11] 13.5 Semiconductor devices/ Interconnect/ Integration technologies
Mon. Sep 13, 2021 9:00 AM - 12:00 PM N304 (Oral)
Yukinori Ono(Shizuoka Univ.)