The 82nd JSAP Autumn Meeting 2021

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Oral presentation

13 Semiconductors » 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[13a-N304-1~11] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

Mon. Sep 13, 2021 9:00 AM - 12:00 PM N304 (Oral)

Yukinori Ono(Shizuoka Univ.)

11:45 AM - 12:00 PM

[13a-N304-11] Fabrication and low-temperature measurements of 4-terminal Si Esaki diode

〇(M1)Suzuka Kimpara1, Takuya Kato1, Masahiro Hori1,2, Yukinori Ono1,2 (1.Shizuoka Univ., 2.RIE, Shizuoka Univ.)

Keywords:silicon, Esaki diode, Phonon