[13a-N304-1~11] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[13a-N304-11] Fabrication and low-temperature measurements of 4-terminal Si Esaki diode

〇(M1)Suzuka Kimpara¹, Takuya Kato¹, Masahiro Hori^1,2, Yukinori Ono^1,2 (1.Shizuoka Univ., 2.RIE, Shizuoka Univ.)

Keywords:silicon, Esaki diode, Phonon