The 82nd JSAP Autumn Meeting 2021

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Oral presentation

8 Plasma Electronics » 8.3 Plasma nanotechnology

[13a-N323-1~10] 8.3 Plasma nanotechnology

Mon. Sep 13, 2021 9:00 AM - 12:00 PM N323 (Oral)

Daisuke Ogawa(Chubu Univ.), Giichiro Uchida(Meijo Univ)

9:30 AM - 9:45 AM

[13a-N323-3] Nanostructure formation on vanadium thin films by helium plasma irradiation

〇(M2)Tomoki Eda1, Shin Kajita2, Noriyasu Ohno1, Hirohiko Tanaka1 (1.Nagoya Univ., 2.IMaSS, Nagoya Univ.)

Keywords:plasma nanoprocessing, surface treatment, modification, and functionalization, nanostructures of thin films