9:30 AM - 9:45 AM
[13a-N323-3] Nanostructure formation on vanadium thin films by helium plasma irradiation
Keywords:plasma nanoprocessing, surface treatment, modification, and functionalization, nanostructures of thin films
Oral presentation
8 Plasma Electronics » 8.3 Plasma nanotechnology
Mon. Sep 13, 2021 9:00 AM - 12:00 PM N323 (Oral)
Daisuke Ogawa(Chubu Univ.), Giichiro Uchida(Meijo Univ)
9:30 AM - 9:45 AM
Keywords:plasma nanoprocessing, surface treatment, modification, and functionalization, nanostructures of thin films