[13a-N323-1~10] 8.3 Plasma nanotechnology

[13a-N323-5] Nanostructure control of GeSn thin film by plasma sputtering and its application to Li-ion batteries

〇Kenta Nagai¹, Ayaka Wakana¹, Junki Hayashi¹, Yuma Habu¹, Misao Kiga¹, Teruya Yamada¹, Giichiro Uchida^1,2 (1.Meijo Univ., 2.Ene. Inst. Meijo Univ.)

Keywords:Plasma, Lithium ion batteries, Nanoparticles