[13a-S203-1~9] 6.3 Oxide electronics

[13a-S203-7] UV sensing mechanism of nanothick TiO₂ channel thin-film transistors

〇Fumihiko Hirose¹ (1.Yamagata Univ.)

Keywords:Thin film Transistor, TiO2, UV

Nanothick TiO₂ channel-thin film transistors (TFTs) are examined as UV sensors. The nanothick TiO₂-channel TFT shows a high drain current modulation, which is explained not only with the direct absorption of the UV photons but also with the surface interactions with oxygen molecules. The operation mechanism of the nanothick TiO₂ TFT is discussed in this conference.