The 82nd JSAP Autumn Meeting 2021

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Oral presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

[13a-S203-1~9] 6.3 Oxide electronics

Mon. Sep 13, 2021 9:00 AM - 11:30 AM S203 (Oral)

Wakabayashi Yuki(NTT), Kohei Ueda(Osaka Univ.)

10:45 AM - 11:00 AM

[13a-S203-7] UV sensing mechanism of nanothick TiO2 channel thin-film transistors

〇Fumihiko Hirose1 (1.Yamagata Univ.)

Keywords:Thin film Transistor, TiO2, UV

Nanothick TiO2 channel-thin film transistors (TFTs) are examined as UV sensors. The nanothick TiO2-channel TFT shows a high drain current modulation, which is explained not only with the direct absorption of the UV photons but also with the surface interactions with oxygen molecules. The operation mechanism of the nanothick TiO2 TFT is discussed in this conference.