[13a-S301-1~7] 6.2 Carbon-based thin films

[13a-S301-4] Deposition of Diamond Films on Cemented Carbide Substrates by Hot Filament CVD Method and Observation of Anomalous Growth

〇Yoshinori Saiki¹, Bando Takahiro¹, Toru Harigai¹, Hirofumi Takikawa¹, Takahiro Hattori², Hiroaki Sugita² (1.Toyohashi Univ. Technol., 2.OSG coating service)

Keywords:Nano crystalline diamond film, Hot Filament CVD method, Polycrystalline diamond

The demand for Carbon Fiber Reinforced Plastic (CFRP) has been increasing in the aerospace and automotive industries because CFRP is lightweight and has high strength. As a tool to cut CFRP, diamond-coated tools, which have high hardness and wear resistance, are used.
In this study, we attempted to deposit diamond films on cemented carbide substrates by Hot Filament CVD system. By controlling CH₄ gas flow rate, diamond films with different grain sizes (1.3 μm and 50 nm) were fabricated. However, the abnormal growth was observed on the diamond film with a grain size of 50 nm. The possible reasons of anomalous growth are discussed.