The 82nd JSAP Autumn Meeting 2021

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Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[13p-N101-1~18] 15.4 III-V-group nitride crystals

Mon. Sep 13, 2021 1:00 PM - 6:00 PM N101 (Oral)

Masataka Imura(NIMS), Tomoyuki Tanikawa(Osaka Univ.), Shuhei Ichikawa(Osaka Univ.)

5:15 PM - 5:30 PM

[13p-N101-16] Growth of UV-C AlGaN Quantum Wells on Annealed Sputtered AlN Template

〇Shoya Ishihara1, Shigeyuki Kuboya2, Kanako Shojiki1, Kenjiro Uesugi2,3, Shiyu Xiao2, Hideto Miyake1,3 (1.Grad. Sch. of Eng. Mie Univ., 2.SPORR. Mie Univ., 3.Grad. Sch. of RIS. Mie Univ.)

Keywords:UV-C, AlGaN, MOVPE