1:15 PM - 1:30 PM
[13p-S301-2] Fabrication and structural analysis of a-SiCNx:H films from the decomposition of organosilicon compound induced by the microwave plasma of N2
Keywords:Plasma CVD, Hydrogenated amorphous silicon carbide
Oral presentation
6 Thin Films and Surfaces » 6.2 Carbon-based thin films
Mon. Sep 13, 2021 1:00 PM - 5:15 PM S301 (Oral)
Kazuhiro Kanda(Univ. of Hyogo), Toru Harigai(Toyohashi Univ. of Tech.)
1:15 PM - 1:30 PM
Keywords:Plasma CVD, Hydrogenated amorphous silicon carbide