[13p-S301-1~15] 6.2 Carbon-based thin films

[13p-S301-9] Structural analysis of DLC films using low-energy positron and soft X-ray beams

〇Kazuhiro Kanda¹, Hiroki Akasaka², Fuminobu Hori³, Atsushi Yabuuchi⁴, Atsushi Kinomura⁴ (1.LASTI, Univ. Hyogo, 2.Eng., Tokyo Inst. Tech., 3.Eng., Osaka Pref. Univ., 4.KURNS, Kyoto Univ.)

Keywords:amorphous carbon film, positron annihilation spectroscopy, near edge X-ray absorption fine structure

The structure of DLC films was discussed from positron annihilation spectroscopy (PAS) measurements at the slow positron beam system in the B-1 hole of the Kyoto University Research Reactor (KUR) and near-edge X-ray absorption fine structure (NEXAFS) measurements at synchrotron radiation facility NewSUBARU BL09A. The DLC films synthesized by the filtered-cathode vacuum arc method have high Martens hardness, and its positron lifetime, S-parameters, and the sp²/(sp²+sp³) ratio of carbon atoms are smaller than those of other DLC films.