The 82nd JSAP Autumn Meeting 2021

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Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[13p-S301-1~15] 6.2 Carbon-based thin films

Mon. Sep 13, 2021 1:00 PM - 5:15 PM S301 (Oral)

Kazuhiro Kanda(Univ. of Hyogo), Toru Harigai(Toyohashi Univ. of Tech.)

3:45 PM - 4:00 PM

[13p-S301-10] Fabrication and structural analysis of high-nitrogen containing a-CNx:H thin films using radio-frequency plasma CVD of the acetylene-N2-Ar gas mixture

〇(M2)Ryota Watanuki1, Haruhiko Ito1, Tsuneo Suzuki1, Tsuyoshi Homma1 (1.Nagaoka Univ of Tech.)

Keywords:Plasma CVD, Hydrogenated amorphous carbon nitride