Ryota Watanuki

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Speaker, Author, Co-Author

Mon. Sep 13, 2021 1:00 PM - 5:15 PM S301 (Oral)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[13p-S301-1~15] 6.2 Carbon-based thin films

3:45 PM - 4:00 PM

[13p-S301-10] Fabrication and structural analysis of high-nitrogen containing a-CN_x:H thin films using radio-frequency plasma CVD of the acetylene-N₂-Ar gas mixture

〇(M2)Ryota Watanuki¹, Haruhiko Ito¹, Tsuneo Suzuki¹, Tsuyoshi Homma¹ (1.Nagaoka Univ of Tech.)