3:45 PM - 4:00 PM
[13p-S301-10] Fabrication and structural analysis of high-nitrogen containing a-CNx:H thin films using radio-frequency plasma CVD of the acetylene-N2-Ar gas mixture
Keywords:Plasma CVD, Hydrogenated amorphous carbon nitride
Oral presentation
6 Thin Films and Surfaces » 6.2 Carbon-based thin films
Mon. Sep 13, 2021 1:00 PM - 5:15 PM S301 (Oral)
Kazuhiro Kanda(Univ. of Hyogo), Toru Harigai(Toyohashi Univ. of Tech.)
3:45 PM - 4:00 PM
Keywords:Plasma CVD, Hydrogenated amorphous carbon nitride