The 82nd JSAP Autumn Meeting 2021

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[22a-P01-1~4] 6.1 Ferroelectric thin films

Wed. Sep 22, 2021 9:00 AM - 10:40 AM P01 (Poster)

9:00 AM - 10:40 AM

[22a-P01-1] Noise Reduction by Principal Component Analysis for Local C-V Mapping

Yoshiomi Hiranaga1, Takanori Mimura2, Takao Shimizu2, Hiroshi Funakubo2, Yasuo Cho1 (1.Tohoku Univ., 2.Tokyo Tech.)

Keywords:ferroelectrics, scanning probe microscopy, hafnium oxide

本講演では,主成分分析によるプローブ顕微鏡データのノイズ除去に焦点を当てつつ,局所C-Vマッピング法によるナノスケール強誘電分極反転評価について紹介する.