[22a-P04-1~18] 6.4 Thin films and New materials

[22a-P04-11] Attempt to THz Gas Sensing by Ceramics Architecture with Terahertz Time-domain Spectroscopy

〇Keiji Komatsu¹, Toshiyuki Iwamoto², Haruhiko Ito¹, Hidetoshi Saitoh¹ (1.Nagaoka Univ. Tech., 2.NIPPO PRECISION Co.,Ltd.)

Keywords:Ceramics Architecture, Terahertz Time-domain Spectroscopy(THz-TDS), Gas Sensing

Detection and analysis of Volatile organic compounds (VOCs) biomarkers from exhaled breath has been recognized in cancer diagnostics. We proposed ppm-ordered VOCs gas sensing by ceramics films with Terahertz Time-domain Spectroscopy (THz-TDS) system. Oxide and carbon films were synthesized on porous glass substrates for detecting VOCs gas with THz-TDS system.