9:00 AM - 10:40 AM
[22a-P04-12] Oxygen Flow Rate Dependence of Crystalline Property of YSZ Thin Films Deposited at Room-temperature by Reactive Sputtering
Keywords:YSZ Thin Film, Reactive Sputtering, Low-temperature Deposition
Presentation information
Poster presentation
6 Thin Films and Surfaces » 6.4 Thin films and New materials
[22a-P04-1~18] 6.4 Thin films and New materials
Wed. Sep 22, 2021 9:00 AM - 10:40 AM P04 (Poster)