[22a-P07-1~6] 7 Beam Technology and Nanofabrication(Poster)

[22a-P07-2] Fabrication of Hf and HfN Spindt-type emitters using triode HPPMS

〇Makoto Ozawa¹, Suruz Mian Md.¹, Takeo Nakano¹, Hiromasa Murata², Katsuhisa Murakami², Masayoshi Nagao² (1.Seikei Univ., 2.AIST)

Keywords:FEA, t-HPPMS, HfN