[22a-P08-1~11] 8 Plasma Electronics(Poster)

[22a-P08-10] Electronic Properties Of SnO2 Films Deposited by Glancing-angle Sputtering

〇Yuma Kameda¹, Yasushi Inoue¹, Osamu Takai² (1.Chiba Inst. Technol., 2.Kanto Gakuin Univ.)

Keywords:Sputtering method, SnO2, gas-sensing material

SnO2 has been utilized as a gas-sensing material. In this study, microstructured SnO2 films were fabricated by glancing-angle sputtering. The SnO2 films exhibited a microstructure with deep nano-order gaps. At the sample temperature of 20 degrees, a resistance drop of 20 percent was observed within 100s after introduction of ethanol gas.