[22p-P01-1~12] 8 Plasma Electronics(Poster)

[22p-P01-9] Plasma diagnostics of carbon-HiPIMS for depositing DLC film (3)

〇Takayuki Ohta¹, Jo Matsushima¹, Akinori Oda², Hiroyuki Kousaka³ (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)

Keywords:diamond-like carbon, amorphous carbon, high power impulse magnetron sputtering

In recent years, diamond-like carbon (DLC) film, which is an amorphous carbon including both graphite (sp2 bond) and diamond (sp3 bond) structures, has attracted attention for a hard mask for fabricating 3D NAND memory chip or tribology applications for a coating of the sliding parts of an automobile engine. In this study, we measured temporal variations of ion energy distribution function for C ion in high power impulse magnetron sputtering using energy-resolved mass spectrometry.