[23a-P06-1~5] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[23a-P06-5] MEMS Rogowski Coil Current Sensor with Spiral Return Coil

〇Yoshiyuki Watanabe¹, Mutsuto Kato¹, Toru Yahagi¹, Hiroki Murayama¹, Naoya Yamada¹, Kenichi Yoshida², Kenichi Maehara², Yusuke Fukuda², Kazuyuki Sashida², Katsuya Ikeda², Kosuke Ikeda², Toshiyuki Takemori² (1.Yamagata RIT, 2.Shindengen)

Keywords:Rogowski Coil, Current sensor, TSV

We have developed a MEMS Rogowski coil current sensor with TSV structural return coil, for detecting overcurrent in power devices. This sensor has a spiral coil capable of current detection and external magnetic field cancellation. When the current detection characteristics based on the slew rate (di / dt) were evaluated, it was possible to detect the current linearly.