The 82nd JSAP Autumn Meeting 2021

Presentation information

Poster presentation

13 Semiconductors » 13.7 Compound and power devices, process technology and characterization

[23a-P10-1~14] 13.7 Compound and power devices, process technology and characterization

Thu. Sep 23, 2021 11:00 AM - 12:40 PM P10 (Poster)

11:00 AM - 12:40 PM

[23a-P10-10] Formation of Ti/Al/Ti ohmic electrodes with smooth surface on AlGaN/GaN HEMT

Taisei Nakano1, Yuzuru Narita1 (1.Yamagata Univ.)

Keywords:ohmic electrode, AlGaN/GaN HEMT