11:00 AM - 12:40 PM
[23a-P10-10] Formation of Ti/Al/Ti ohmic electrodes with smooth surface on AlGaN/GaN HEMT
Keywords:ohmic electrode, AlGaN/GaN HEMT
Presentation information
Poster presentation
13 Semiconductors » 13.7 Compound and power devices, process technology and characterization
[23a-P10-1~14] 13.7 Compound and power devices, process technology and characterization
Thu. Sep 23, 2021 11:00 AM - 12:40 PM P10 (Poster)