[23a-P11-1~18] 13.8 Optical properties and light-emitting devices

[23a-P11-16] Design and fabrication of distributed feedback waveguide using Si/CaF₂ heterostructures

〇Kenta Kitamura¹, Gensai Tei¹, Long Liu¹, Yohei Koyanagi¹, Daiki Sugawara¹, Masahiro Watanabe¹ (1.Tokyo Tech)

Keywords:Quantum Cascade Laser, distributed feedback waveguide, Silicon Photonics

A distributed feedback waveguide based on a calcium fluoride hetero-quantum structure has been designed for near-infrared wavelengths, and its applicability to calcium fluoride quantum cascade laser structures has been investigated by simulation. The initial investigation for the fabrication process of a grating structure is also reported.