Ukei Riyuu

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Speaker, Author, Co-Author

Wed. Mar 17, 2021 1:30 PM - 4:15 PM Z29 (Z29)

Oral presentation
| 16 Amorphous and Microcrystalline Materials
| 16.3 Bulk, thin-film and other silicon-based solar cells

[17p-Z29-1~10] 16.3 Bulk, thin-film and other silicon-based solar cells

1:30 PM - 1:45 PM

▲ [17p-Z29-1] Recovery of PH₃ plasma-ion-implantation-induced damages in p-type amorphous silicon by flash lamp annealing

〇(M2)Ukei Riyuu¹, Huynh Thi Cam Tu¹, Noboru Yamaguchi², Keisuke Ohdaira¹ (1.JAIST, 2.ULVAC Inc.)