Noriko Miura

→ Search for Noriko Miura in Google Scholar

Speaker, Author, Co-Author

Fri. Mar 19, 2021 9:00 AM - 11:45 AM Z24 (Z24)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19a-Z24-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:15 AM - 11:30 AM

[19a-Z24-9] Study of Device Process Using Minimal Ion Implantation Tool

〇Noriko Miura¹, Naoki Hashimoto^2,1, Yoshitaka Kitamura^2,1, Fumito Imura³, Kazuhiro Koga¹, Kazushige Sato¹, Yuuki Ishida^3,1, Sommawan Khumpuang^3,1, Shiro Hara^3,1 (1.MINIMAL, 2.FUJI IMVAC INC., 3.AIST)

▲