9:00 AM - 9:15 AM
〇Kazumasa Nemoto1, Hiroyuki Tanaka1, Takaaki Sakai3,2, Atsushi Kajikura3,2, Zhen Yang4,2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.Minimal Fab, 3.Fujikoshi, 4.VIYIA)
Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Fri. Mar 19, 2021 9:00 AM - 11:45 AM Z24 (Z24)
Hitoshi Habuka(Yokohama Natl. Univ.), Yan Wu(Nihon Univ.)
△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above
9:00 AM - 9:15 AM
〇Kazumasa Nemoto1, Hiroyuki Tanaka1, Takaaki Sakai3,2, Atsushi Kajikura3,2, Zhen Yang4,2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.Minimal Fab, 3.Fujikoshi, 4.VIYIA)
9:15 AM - 9:30 AM
〇Shuichi Noda1, Yuuki Yabuta3, Naoko Yamamoto3, Ryuichiro Kamei3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.Seinan-kogyo)
9:30 AM - 9:45 AM
〇Masaya Hotta1, Hiroshi Nishizato1, Haruki Toonoe2, Ikunari Shiba2, Takuya Maeda3, Yuki Odo3, Satoshi Fujii3 (1.HORIBA STEC, 2.YOKOGAWA S.S., 3.N.I.T. Okinawa call.)
9:45 AM - 10:00 AM
〇Hiroyuki Tanaka1, Yoshiyuki Nozawa2,3, Toshihiro Hayami2,3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.SPPT)
10:00 AM - 10:15 AM
〇Takeshi Aizawa1, Tasuku Sakurai1, Tatsuo Ishijima1, Yasunori Tanaka1, Yusuke Nakano1, Shiro Hara2,3 (1.Kanazawa Univ., 2.MINIMAL, 3.AIST)
10:30 AM - 10:45 AM
〇Shuhei Nakamichi1, Hiroyuki Tanaka2, Fumito Imura2, Shuichi Noda2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST)
10:45 AM - 11:00 AM
〇Hiroyuki Tanaka1, Yoshiyuki Nozawa2,3, Toshihiro Hayami2,3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.SPPT)
11:00 AM - 11:15 AM
Atsuhiro Motomiya1, Mana Otani1, 〇Hitoshi Habuka1, Shin-ichi Ikeda2,3, Yuuki Ishida2,3, Shiro Hara2,3 (1.Yokohama National Univ., 2.MINIMAL, 3.AIST)
11:15 AM - 11:30 AM
〇Noriko Miura1, Naoki Hashimoto2,1, Yoshitaka Kitamura2,1, Fumito Imura3, Kazuhiro Koga1, Kazushige Sato1, Yuuki Ishida3,1, Sommawan Khumpuang3,1, Shiro Hara3,1 (1.MINIMAL, 2.FUJI IMVAC INC., 3.AIST)
11:30 AM - 11:45 AM
〇Masashi Kase1, Koga Kazuhiro2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
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