Hitoshi Habuka(Yokohama Natl. Univ.), Yan Wu(Nihon Univ.)
Yan Wu
Chairperson, etc.
Fri. Mar 19, 2021 9:00 AM - 11:45 AM Z24 (Z24)
- Oral presentation
- | 13 Semiconductors
- | 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Fri. Mar 19, 2021 9:00 AM - 11:45 AM Z24 (Z24)
Hitoshi Habuka(Yokohama Natl. Univ.), Yan Wu(Nihon Univ.)