Kazumasa Nemoto

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 9:00 AM - 11:45 AM Z24 (Z24)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19a-Z24-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:00 AM - 9:15 AM

[19a-Z24-1] Development of a wide variety of half-inch wafers that can be used in Minimal Fab

〇Kazumasa Nemoto¹, Hiroyuki Tanaka¹, Takaaki Sakai^3,2, Atsushi Kajikura^3,2, Zhen Yang^4,2, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.Minimal Fab, 3.Fujikoshi, 4.VIYIA)

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