Takeshi Aizawa

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 9:00 AM - 11:45 AM Z24 (Z24)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19a-Z24-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:00 AM - 10:15 AM

[19a-Z24-5] Investigation of Ashing Rate and Uniformity Improvement using Microwave-Excited Water Vapor Plasma

〇Takeshi Aizawa¹, Tasuku Sakurai¹, Tatsuo Ishijima¹, Yasunori Tanaka¹, Yusuke Nakano¹, Shiro Hara^2,3 (1.Kanazawa Univ., 2.MINIMAL, 3.AIST)