Masaya Hotta

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 9:00 AM - 11:45 AM Z24 (Z24)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19a-Z24-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:30 AM - 9:45 AM

[19a-Z24-3] Deposition of AlN thin film using minimal RF-sputtering machine

〇Masaya Hotta¹, Hiroshi Nishizato¹, Haruki Toonoe², Ikunari Shiba², Takuya Maeda³, Yuki Odo³, Satoshi Fujii³ (1.HORIBA STEC, 2.YOKOGAWA S.S., 3.N.I.T. Okinawa call.)

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