Hansin BAE

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:00 AM - 12:00 PM Z17 (Z17)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18a-Z17-1~11] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

10:00 AM - 10:15 AM

▲ [18a-Z17-5] High-speed Deposition of Graphite-like Carbon Film by Microwave Surface-Wave Plasma

〇Hansin BAE¹, Kazuya Hikita¹, Haruka Suzuki^1,2, Kensuke Sasai², Hirotaka Toyoda^1,2,3 (1.Nagoya Univ., 2.cLPS, 3.NIFS)