Takuya Fukui

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Speaker, Author, Co-Author

Wed. Mar 17, 2021 9:00 AM - 11:45 AM Z28 (Z28)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[17a-Z28-1~10] 15.6 Group IV Compound Semiconductors (SiC)

11:30 AM - 11:45 AM

[17a-Z28-10] Evaluation of the effect of the ion implantation process on carrier lifetimes in 4H-SiC SJ-UMOSFET

〇Takuya Fukui¹, Takeshi Tawara², Masashi Kato¹ (1.NITech., 2.AIST)