Akihiro Suzuki

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 9:00 AM - 11:30 AM Z29 (Z29)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[19a-Z29-1~9] 15.7 Crystal characterization, impurities and crystal defects

9:15 AM - 9:30 AM

△ [19a-Z29-2] Characteristics of Molecular Ion Implanted Epitaxial Silicon Wafers for 3D-stacked CMOS Image Sensors (II)
– In Situ TEM Observation of Thermal Dissolution Behavior of CH₄N Multielement-Molecular-Ion-Implantation-Induced Defects –

〇Akihiro Suzuki¹, Takeshi Kadono¹, Ryo Hirose¹, Koji Kobayashi¹, Ayumi Masada¹, Ryosuke Okuyama¹, Yoshihiro Koga¹, Kazunari Kurita¹ (1.SUMCO)