Motonari Sato

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 1:30 PM - 6:15 PM Z10 (Z10)

Oral presentation
| 3 Optics and Photonics
| 3.15 Silicon photonics and integrated photonics

[16p-Z10-1~17] 3.15 Silicon photonics and integrated photonics

2:15 PM - 2:30 PM

[16p-Z10-4] Voids occupancy comparison of directly bonded InP / Si substrate using gas out channel

〇Motonari Sato¹, Takahiro Ishizaki¹, Takuto Shirai¹, Koki Tsushima¹, Kota Shibukawa¹, Koji Agata¹, Momoko Kotani¹, Shingo Ito¹, Xu Han¹, Kazuhiko Shimomura¹ (1.Sophia Univ.)

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