Takayoshi Tsutsumi

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 1:00 PM - 7:45 PM Z12 (Z12)

Oral presentation
| 8 Plasma Electronics
| 8.8 Division of Plasma Electronics 30th Anniversary Special Session

[16p-Z12-1~17] 8.8 Division of Plasma Electronics 30th Anniversary Special Session

6:45 PM - 7:00 PM

[16p-Z12-14] Ar ion energy dependence on characteristics of atomic layer etching for GaN by Cl adsorption

〇Takayoshi Tsutsumi¹, Masaki Hasegawa¹, Shohei Nakamura^1,2, Atsushi Tanide², Hiroki Kondo¹, Makoto Sekine¹, Kenji Ishikawa¹, Masaru Hori¹ (1.Nagoya Univ., 2.SCREEN Holdings Co., Ltd)

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