15:00 〜 15:15 ▲ [18p-Z24-7] Characteristics of Millisecond Solid Phase Crystallization of Phosphorus Doped Silicon Film Annealed by Thermal-Plasma-Jet Irradiation 〇(D)Nguyen ThiKhanh Hoa1、Hiroaki Hanafusa1、Seiichiro Higashi1 (1.Hiroshima Univ.)