Mie Tohnishi

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 10:00 AM - 10:50 AM P04 (Poster)

Poster presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.3 Novel technologies and interdisciplinary engineering

[16a-P04-1~6] 1.3 Novel technologies and interdisciplinary engineering

10:00 AM - 10:50 AM

[16a-P04-6] Observation of positive type photoresist surface roughness processed by Solid-source H₂O Plasma

〇Mie Tohnishi¹, Akihiro Matsutani¹ (1.Tokyo Tech. OFC)