Taisei Nagai

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 9:00 AM - 12:15 PM Z13 (Z13)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16a-Z13-1~12] 13.3 Insulator technology

9:15 AM - 9:30 AM

[16a-Z13-2] Effects of chemical cleaning with HCl Solution on Al₂O₃/GaN interface properties

〇(M1)Taisei Nagai¹, Noriyuki Taoka¹, Akio Ohta¹, Mitsuhisa Ikeda¹, Katsunori Makihara¹, Seiichi Miyazaki¹ (1.Nagoya Univ.)