Hirotaka Iino

→ Search for Hirotaka Iino in Google Scholar

Speaker, Author, Co-Author

Tue. Mar 16, 2021 9:00 AM - 12:15 PM Z13 (Z13)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16a-Z13-1~12] 13.3 Insulator technology

9:30 AM - 9:45 AM

[16a-Z13-3] Study of improvement of GeO₂ film quality and GeO₂/Ge interface state by pure water rinse after PMA

〇(M1)Hirotaka Iino¹, Haruka Horiguchi¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.Noukou univ.)