Keisuke Ito

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 9:00 AM - 12:15 PM Z13 (Z13)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16a-Z13-1~12] 13.3 Insulator technology

9:45 AM - 10:00 AM

[16a-Z13-4] Study on improvement of GeO₂ film quality by plasma nitriding

〇(M1)Keisuke Ito¹, Hiroki Takahashi¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.Noukou univ.)