Tsung-En Lee

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 9:00 AM - 12:15 PM Z13 (Z13)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16a-Z13-1~12] 13.3 Insulator technology

10:00 AM - 10:15 AM

▲ [16a-Z13-5] [Young Scientist Presentation Award Speech] Defect control of Y₂O₃-based SiGe MOS interfaces properties

〇Tsung-En Lee¹, Kasidit Toprasertpong¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1.Univ. of Tokyo)