Kentaro Saito

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 10:00 AM - 10:45 AM Z29 (Z29)

Oral presentation
| 16 Amorphous and Microcrystalline Materials
| 16.1 Fundamental properties, evaluation, process and devices in disordered materials

[16a-Z29-1~3] 16.1 Fundamental properties, evaluation, process and devices in disordered materials

10:00 AM - 10:15 AM

[16a-Z29-1] Modeling of low-temperature atomic layer deposition of aluminum nitride

〇(D)Kentaro Saito^1,2, Kazuki Yoshida^1,2, Masanori Miura³, Kensaku Kanomata³, Bashir Ahmmad¹, Shigeru Kubota¹, Fumihiko Hirose¹ (1.Yamagata Univ., 2.JSPS Research Fellow DC, 3.ROEL Yamagata Univ.)

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