Sri Ayu Anggraini

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 4:00 PM - 4:50 PM P07 (Poster)

Poster presentation
| 9 Applied Materials Science
| 9.1 Dielectrics, ferroelectrics

[16p-P07-1~5] 9.1 Dielectrics, ferroelectrics

4:00 PM - 4:50 PM

▲ [16p-P07-4] Controlling the polarity of scandium aluminum nitride (ScAlN) piezoelectric thin film via Si addition

〇Sri Ayu Anggraini¹, Masato Uehara¹, Kenji Hirata¹, Hiroshi Yamada¹, Morito Akiyama¹ (1.AIST)