Akito Hara

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 5:00 PM - 5:50 PM P13 (Poster)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[16p-P13-1~2] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

5:00 PM - 5:50 PM

[16p-P13-1] Performance of CLC poly-Si_1-xGe_x TFTs on glass substrates

〇Akito Hara¹, Kuninori Kitahara² (1.Tohoku Gakuin Univ., 2.Shimane Univ.)