TzuHsiang Yen

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 1:30 PM - 6:15 PM Z10 (Z10)

Oral presentation
| 3 Optics and Photonics
| 3.15 Silicon photonics and integrated photonics

[16p-Z10-1~17] 3.15 Silicon photonics and integrated photonics

5:30 PM - 5:45 PM

▲ [16p-Z10-15] Local thickness tuning or adjustment of SOI layer by u-transfer printing

〇(D)TzuHsiang Yen¹, Rai Kou¹, Makoto Okano¹, Koji Yamada¹ (1.National Inst. of AIST)