Yusuke Sasaki

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 1:00 PM - 7:45 PM Z12 (Z12)

Oral presentation
| 8 Plasma Electronics
| 8.8 Division of Plasma Electronics 30th Anniversary Special Session

[16p-Z12-1~17] 8.8 Division of Plasma Electronics 30th Anniversary Special Session

6:15 PM - 6:30 PM

[16p-Z12-12] Low Temperature Plasma CVD of SiNx by Incorporating Nano Particles

〇(M2)Yusuke Sasaki¹, Tomoaki Yoshida¹, Kouhei Abe¹, Koudai Yamamoto¹, Kunihiro Kamataki¹, Takamasa Okumura¹, Naho Itagaki¹, Kazunori Koga^1,2, Masaharu Shiratani¹ (1.Kyushu Univ., 2.NIFS)

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