FatimaJenina Tolentino Arellano

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 1:00 PM - 7:45 PM Z12 (Z12)

Oral presentation
| 8 Plasma Electronics
| 8.8 Division of Plasma Electronics 30th Anniversary Special Session

[16p-Z12-1~17] 8.8 Division of Plasma Electronics 30th Anniversary Special Session

4:45 PM - 5:00 PM

▲ [16p-Z12-7] Validation of PIC/MCC simulation coupled with CRM for capacitively-coupled Ar plasma by OES measurements

〇(M2)FatimaJenina Tolentino Arellano¹, Zoltan Donko^1,2, Peter Hartmann², Tsanko Tsankov³, Uwe Czarnetzki³, Satoshi Hamaguchi¹ (1.Osaka University, 2.Wigner Research for Physics, Budapest, 3.Ruhr University Bochum)

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